CSET：2024追踪极紫外光刻的出现报告（英文版）

This paper presents a case study on the most important technology to have emerged in the past decade: extreme ultraviolet (EUV) lithography. In 2019, when the first commercial electronics enabled by EUV were released, the technology was hailed as “the machine that saved Moore’s Law.” 1 All of today’s most advanced artificial intelligence (AI) chips, smartphones, autonomous driving systems, and highperformance computers contain semiconductors fabricated using EUV lithography. The Dutch c